Rf-Magnetron Sputtering

Ta–Si contacts to n-SiC for high temperatures devices

Engineering / Comparative Study / Silicon Carbide / Physical sciences / Surface Morphology / High Temperature / CHEMICAL SCIENCES / X ray diffraction / Electrical Properties / Microstructures / Contact Resistance / Ohmic Contact / Rf-Magnetron Sputtering / Rutherford Backscattering Spectroscopy / Current-Voltage Characteristic / High Temperature / CHEMICAL SCIENCES / X ray diffraction / Electrical Properties / Microstructures / Contact Resistance / Ohmic Contact / Rf-Magnetron Sputtering / Rutherford Backscattering Spectroscopy / Current-Voltage Characteristic